Publication:

Novel RIE-process for high quality InP-based waveguide structures

Date

1995

Proceedings Paper

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Author(s)

;

Spiekman, L. H.

;

;

Moerman, Ingrid

;

;

Pedersen, J. W.

Statistics

1976 since deposited on 2021-09-29

Acq. date: 2026-07-29