Publication:
Correlation between the growth-per-cycle and the surface OH group concentration in the AIMe3/H2O ALD process
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1983 since deposited on 2021-10-15
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Acq. date: 2026-01-26
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Statistics
Views
1983 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-01-26
Citations