Publication:

Progress in full field EUV lithography program at IMEC

Date

2007

Proceedings Paper

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Author(s)

Goethals, Mieke

;

;

Jonckheere, Rik

;

Baudemprez, Bart

;

;

;

Kim, Byeong Soo

;

;

;

Niroomand, Ardavan

;

Stepanenko, Nickolay

;

Van Roey, Frieda

;

Pollentier, Ivan

;

Metrics

1927 since deposited on 2021-10-16

Acq. date: 2025-12-09