Publication:

Design and pitch scaling for affordable node transition and EUV insertion scenario

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2257885

Simple item page Full metadata Statistics

Files

37540.pdf 2.74 MB

Author(s)

Kim, Ryan Ryoung han

;

Ryckaert, Julien

;

Raghavan, Praveen

;

Sherazi, Yasser

;

Debacker, Peter

;

Trivkovic, Darko

;

Gillijns, Werner

;

;

Drissi, Youssef

;

;

;

;

Lariviere, Stephane

;

Statistics

1 since deposited on 2021-10-24

Acq. date: 2026-03-01

2020 since deposited on 2021-10-24

Acq. date: 2026-03-01