Publication:

Physical characterization of the metal/high-k layer interaction upon annealing

Date

2008

Proceedings Paper

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Files

17097.pdf 359.02 KB

Author(s)

Conard, Thierry

;

Franquet, Alexis

;

Vandervorst, Wilfried

;

;

Van den berg, J.

;

Van Elshocht, Sven

;

;

Adelmann, Christoph

;

De Gendt, Stefan

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Acq. date: 2026-02-27