Optimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration steps

dc.contributor.author	van der Veen, Marleen
dc.contributor.author	Barbarin, Yohan
dc.contributor.author	Boemmels, Juergen
dc.contributor.author	Tokei, Zsolt
dc.contributor.imecauthor	van der Veen, Marleen
dc.contributor.imecauthor	Boemmels, Juergen
dc.contributor.imecauthor	Tokei, Zsolt
dc.contributor.orcidimec	van der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned	2021-10-22T07:06:50Z
dc.date.available	2021-10-22T07:06:50Z
dc.date.embargo	9999-12-31
dc.date.issued	2014-11
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24682
dc.identifier.url	http://imnc.jp/invited2014.html
dc.source.beginpage	7D-8-1
dc.source.conference	27th International Microprocesses and Nanotechnology Conference - MNC
dc.source.conferencedate	4/11/2014
dc.source.conferencelocation	Fukuoka Japan
dc.title	Optimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration steps
dc.type	Proceedings paper
dspace.entity.type	Publication
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