Publication:

Evaluation of a dry laser cleaning process for the removal of surface particles

Date

1999
Proceedings Paper
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dc.contributor.authorVereecke, Guy
dc.contributor.authorRöhr, Erika
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-14T11:53:34Z
dc.date.available2021-10-14T11:53:34Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3989
dc.source.beginpage187
dc.source.conferenceUltra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon
dc.source.conferencedate21/09/1998
dc.source.conferencelocationOostende Belgium
dc.source.endpage190
dc.title

Evaluation of a dry laser cleaning process for the removal of surface particles

dc.typeProceedings paper
dspace.entity.typePublication
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