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dc.contributor.author	Waeterloos, Joost
dc.date.accessioned	2021-10-14T11:56:24Z
dc.date.available	2021-10-14T11:56:24Z
dc.date.issued	1999-06
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4016
dc.title	Characterization and integration of low permittivity dielectrics
dc.type	PHD thesis
dspace.entity.type	Publication
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Characterization and integration of low permittivity dielectrics

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