Publication:

Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixtures

Date

2000
Journal article
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dc.contributor.authorKnotter, D. M.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T13:10:31Z
dc.date.available2021-10-14T13:10:31Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4486
dc.source.beginpage736
dc.source.endpage740
dc.source.issue2
dc.source.journalJournal of the Electrochemical Society
dc.source.volume147
dc.title

Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixtures

dc.typeJournal article
dspace.entity.typePublication
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