Publication:
Ion beam synthesis of ternary phase CoFe-silicide in (111)Silicon
Date
| dc.contributor.author | Tavares, J. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Wu, Ming Fang | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Langouche, G. | |
| dc.contributor.author | Lin, Chia-Hui | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.date.accessioned | 2021-09-29T13:17:31Z | |
| dc.date.available | 2021-09-29T13:17:31Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/904 | |
| dc.source.beginpage | 986 | |
| dc.source.endpage | 988 | |
| dc.source.journal | Appl. Phys. Lett. | |
| dc.source.volume | 67 | |
| dc.title | Ion beam synthesis of ternary phase CoFe-silicide in (111)Silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |