Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits

dc.contributor.author	Selvaraja, Shankar
dc.contributor.author	Schaekers, Marc
dc.contributor.author	Bogaerts, Wim
dc.contributor.author	Van Thourhout, Dries
dc.contributor.imecauthor	Schaekers, Marc
dc.contributor.imecauthor	Bogaerts, Wim
dc.contributor.imecauthor	Van Thourhout, Dries
dc.contributor.orcidimec	Schaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimec	Bogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimec	Van Thourhout, Dries::0000-0003-0111-431X
dc.date.accessioned	2021-10-22T05:41:17Z
dc.date.available	2021-10-22T05:41:17Z
dc.date.issued	2014
dc.identifier.issn	0030-4018
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24507
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0030401813009504
dc.source.beginpage	210
dc.source.endpage	216
dc.source.journal	Optics Communications
dc.source.volume	313
dc.title	Deposited amorphous silicon-on-insulator technology for nano-photonic integrated circuits
dc.type	Journal article
dspace.entity.type	Publication
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