Publication:
The analysis of ultra-thin films with HRBS-30
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Kimura, Kenji | |
| dc.contributor.author | Schiettekatte, Francois | |
| dc.contributor.author | Sajavaara, Timo | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-18T15:26:39Z | |
| dc.date.available | 2021-10-18T15:26:39Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16802 | |
| dc.source.conference | 21st International Conference on the Application of Accelerators in Research and Industry - CAARI | |
| dc.source.conferencedate | 8/08/2010 | |
| dc.source.conferencelocation | Fort Worth, TX USA | |
| dc.title | The analysis of ultra-thin films with HRBS-30 | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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