Publication:
Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
Date
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Wafer, K. | |
| dc.contributor.author | Johnson, J.A. | |
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Schwitters, M. | |
| dc.contributor.author | Paraschiv, Vasile | |
| dc.contributor.author | Maes, David | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | Caputa, Concetta | |
| dc.contributor.author | Zambrano, R. | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.imecauthor | Paraschiv, Vasile | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.date.accessioned | 2021-10-15T14:30:47Z | |
| dc.date.available | 2021-10-15T14:30:47Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9213 | |
| dc.source.beginpage | 3 | |
| dc.source.conference | Ferroelectric Thin Films XII | |
| dc.source.conferencedate | 1/12/2003 | |
| dc.source.conferencelocation | Boston, MA USA | |
| dc.source.endpage | 8 | |
| dc.title | Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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