Publication:

Ru/STO/Ru DRAM MIM capacitors by atomic layer deposition

Date

2015
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.date.accessioned2021-10-22T21:54:07Z
dc.date.available2021-10-22T21:54:07Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25770
dc.source.conferenceNamlab Novel High k Application Workshop
dc.source.conferencedate10/03/2015
dc.source.conferencelocationDresden Germany
dc.title

Ru/STO/Ru DRAM MIM capacitors by atomic layer deposition

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations