Publication:
On the electrical activity of oxygen-related extended defects in silicon
Date
dc.contributor.author | Vanhellemont, Jan | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Bosman, Gijs | |
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Kaniava, Arvydas | |
dc.contributor.author | Gaubas, Eugenijus | |
dc.contributor.author | Blondeel, A. | |
dc.contributor.author | Clauws, P. | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.accessioned | 2021-09-29T12:51:27Z | |
dc.date.available | 2021-09-29T12:51:27Z | |
dc.date.embargo | 9999-12-31 | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/428 | |
dc.source.beginpage | 670 | |
dc.source.conference | Proceedings of the 7th International Symposium on Silicon Materials Science and Technology - Semiconductor Silicon/1994 | |
dc.source.conferencedate | 22/05/1994 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.source.endpage | 683 | |
dc.title | On the electrical activity of oxygen-related extended defects in silicon | |
dc.type | Proceedings paper | |
dspace.entity.type | Publication | |
Files | Original bundle
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