Publication:

Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform

Date

2016
Proceedings Paper
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dc.contributor.authorRochus, Veronique
dc.contributor.authorJansen, Roelof
dc.contributor.authorGoyvaerts, Jeroen
dc.contributor.authorVandenboch, Guy
dc.contributor.authorvan de Voort, Bob
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorGoyvaerts, Jeroen
dc.contributor.imecauthorvan de Voort, Bob
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-23T14:16:12Z
dc.date.available2021-10-23T14:16:12Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27222
dc.source.conference17th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectr. and Microsyst. - EuroSimE
dc.source.conferencedate18/04/2016
dc.source.conferencelocationMontpellier France
dc.title

Design of a MZI micro-opto-mechanical pressure sensor for a SiN photonics platform

dc.typeProceedings paper
dspace.entity.typePublication
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