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Conference contributions
Comparison between intrinsic and integrated reliability properties of low-k materials
Publication:
Comparison between intrinsic and integrated reliability properties of low-k materials
Date
2011
Meeting abstract
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21843.pdf
438.91 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Croes, Kristof
;
Pantouvaki, Marianna
;
Carbonell, Laure
;
Zhao, Larry
;
Beyer, Gerald
;
Tokei, Zsolt
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Abstract
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1912
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1912
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations