Publication:

Selective area growth of InP in shallow trench isloated structures on off-axis Si (001) substrates

Date

2010
Journal article
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dc.contributor.authorWang, Gang
dc.contributor.authorLeys, Maarten
dc.contributor.authorNguyen, Duy
dc.contributor.authorLoo, Roger
dc.contributor.authorBrammertz, Guy
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorDekoster, Johan
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-19T00:15:16Z
dc.date.available2021-10-19T00:15:16Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18329
dc.source.beginpageH1023
dc.source.endpageH1028
dc.source.issue11
dc.source.journalJournal of the Electrochemical Society
dc.source.volume157
dc.title

Selective area growth of InP in shallow trench isloated structures on off-axis Si (001) substrates

dc.typeJournal article
dspace.entity.typePublication
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