Publication:

Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy

Date

1998
Journal article
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dc.contributor.authorZhang, Feng
dc.contributor.authorLiu, X.
dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorLou, N. Z.
dc.contributor.authorWilson, Z. H.
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-01T09:51:45Z
dc.date.available2021-10-01T09:51:45Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3167
dc.source.beginpage61
dc.source.endpage66
dc.source.issue1_2
dc.source.journalNuclear Instruments and Methods. B
dc.source.volume42
dc.title

Microstructure of titanium oxide films investigated by atomic force microscopy and transmission electron microscopy

dc.typeJournal article
dspace.entity.typePublication
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