Publication:

Quasi continuous A-SIN:H-PECVD system with high throughput rate for solar cell AR-coating

Date

2000
Proceedings Paper
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dc.contributor.authorSchitthelm, F.
dc.contributor.authorVölk, P.
dc.contributor.authorDekkers, Harold
dc.contributor.authorSzlufcik, Jozef
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.date.accessioned2021-10-14T13:44:18Z
dc.date.available2021-10-14T13:44:18Z
dc.date.embargo9999-12-31
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4729
dc.source.beginpage1609
dc.source.conference16th European Photovoltaic Solar Energy Conference. Proceedings
dc.source.conferencedate1/05/2000
dc.source.conferencelocationGlasgow UK
dc.source.endpage1612
dc.title

Quasi continuous A-SIN:H-PECVD system with high throughput rate for solar cell AR-coating

dc.typeProceedings paper
dspace.entity.typePublication
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