Publication:

Reaction Mechanisms and EB Patterning Evaluation of Sn-complex-side-chain Polymer Used for EUV Lithography

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2670173
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Author(s)

Takata, Yui
;
Muroya, Yusa
;
Kozawa, Takahiro
;
Enomoto, Satoshi
;
Naqvi, Bilal  
;
De Simone, Danilo  

Journal

Proceedings of SPIE

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747 since deposited on 2023-07-28
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Acq. date: 2026-08-06

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747 since deposited on 2023-07-28
1last month
Acq. date: 2026-08-06

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