Publication:
Hydrogen-plasma-enhanced thermal donor formation in n-type high-ressitivity MCZ silicon
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Huang, Y.L. | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Rafi, J.M. | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Fahrner, W.R. | |
| dc.contributor.author | Versluijs, Janko | |
| dc.contributor.author | Clauws, P. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.imecauthor | Versluijs, Janko | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-16T05:06:42Z | |
| dc.date.available | 2021-10-16T05:06:42Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11213 | |
| dc.source.beginpage | 165 | |
| dc.source.conference | Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing IV | |
| dc.source.conferencedate | 16/09/2005 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.source.endpage | 175 | |
| dc.title | Hydrogen-plasma-enhanced thermal donor formation in n-type high-ressitivity MCZ silicon | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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