Publication:

Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performance

Date

Loading...
Thumbnail Image

Journal

Abstract

Description

Statistics

Views

1920 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-03-17

Citations

Statistics

Views

1920 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-03-17

Citations