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Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performance
Publication:
Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performance
Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nagar, Magi
;
Vaes, Jan
;
Ein-Eli, Yair
Journal
Electrochimica Acta
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1914
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1914
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations