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Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performance

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1928 since deposited on 2021-10-18
5last month
Acq. date: 2026-08-19

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1928 since deposited on 2021-10-18
5last month
Acq. date: 2026-08-19

Citations