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Thermal characterization of the inter-die thermal resistance of hybrid Cu/dielectric wafer-to-wafer bonding
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Thermal characterization of the inter-die thermal resistance of hybrid Cu/dielectric wafer-to-wafer bonding
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Date
2016-05
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Oprins, Herman
;
Cherman, Vladimir
;
Webers, Tomas
;
Salahouelhadj, Abdellah
;
Kim, Soon-Wook
;
Peng, Lan
;
Van der Plas, Geert
;
Beyne, Eric
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1953
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations
Metrics
Views
1953
since deposited on 2021-10-23
Acq. date: 2025-12-15
Citations