Publication:
Tuning the strength of chemical patterns for directed self-assembly of block copolymers
Date
| dc.contributor.author | Williamson, Lance | |
| dc.contributor.author | Lin, Guanyang | |
| dc.contributor.author | Cao, Yi | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | Nealey, Paul | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.date.accessioned | 2021-10-22T08:18:49Z | |
| dc.date.available | 2021-10-22T08:18:49Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24820 | |
| dc.identifier.url | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857167 | |
| dc.source.beginpage | 90491B | |
| dc.source.conference | Alternative Lithographic Technologies VI | |
| dc.source.conferencedate | 23/02/2014 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Tuning the strength of chemical patterns for directed self-assembly of block copolymers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |