Publication:
Metal gate work function extraction using Fowler-Nordheim tunneling techniques
Date
| dc.contributor.author | Sjöblom, G. | |
| dc.contributor.author | Pantisano, Luigi | |
| dc.contributor.author | Schram, Tom | |
| dc.contributor.author | Olsson, J. | |
| dc.contributor.author | Afanas'ev, V. | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Schram, Tom | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-16T05:08:30Z | |
| dc.date.available | 2021-10-16T05:08:30Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11218 | |
| dc.source.beginpage | 280 | |
| dc.source.endpage | 283 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 80 | |
| dc.title | Metal gate work function extraction using Fowler-Nordheim tunneling techniques | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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