Publication:

Bulk FinFET fabrication with new approaches for oxide topography control using dry removal techniques

Date

2011-03

Proceedings Paper

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Files

22398.pdf 206.65 KB

Author(s)

Redolfi, Augusto

;

;

Devriendt, Katia

;

Shamiryan, Denis

;

Vandeweyer, Tom

;

Horiguchi, Naoto

;

Togo, Mitsuhiro

;

Wouters, Johan M. D.

;

;

Hoffmann, Thomas Y.

;

Cockburn, Andrew

;

Gravey, Virginie

;

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Acq. date: 2026-05-30