Publication:

Alpha-Ta formation and its impact on electromigration

Date

2004
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorMichelon, Julien
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-15T13:12:36Z
dc.date.available2021-10-15T13:12:36Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8833
dc.source.beginpage355
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal Canada
dc.source.endpage359
dc.title

Alpha-Ta formation and its impact on electromigration

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
8868.pdf
Size:
516.25 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions