Publication:
BEOL technology at 20nm half-pitch
Date
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.date.accessioned | 2021-10-19T12:34:23Z | |
| dc.date.available | 2021-10-19T12:34:23Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 0038-111X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18563 | |
| dc.identifier.url | http://www.electroiq.com/articles/sst/print/volume-54/issue-5/features/interconnect-structures/beol-technology-at-20nm-half-pitc | |
| dc.source.beginpage | 16 | |
| dc.source.endpage | 17 | |
| dc.source.issue | 5 | |
| dc.source.journal | Solid State Technology | |
| dc.source.volume | 54 | |
| dc.title | BEOL technology at 20nm half-pitch | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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