Publication:
Calibration of Gaussian Random Field stochastic EUV models
| dc.contributor.author | Latypov, Azat M. | |
| dc.contributor.author | Wei, Chih-, I | |
| dc.contributor.author | De Bisschop, Peter | |
| dc.contributor.author | Khaira, Gurdaman | |
| dc.contributor.author | Fenger, Germain | |
| dc.contributor.imecauthor | De Bisschop, Peter | |
| dc.contributor.orcidimec | De Bisschop, Peter::0000-0002-8297-5076 | |
| dc.date.accessioned | 2023-01-05T12:48:22Z | |
| dc.date.available | 2022-09-19T02:51:17Z | |
| dc.date.available | 2023-01-05T12:48:22Z | |
| dc.date.issued | 2022 | |
| dc.description.wosFundingText | This project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 783247. The JU receives support from the European Union's Horizon 2019 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, United Kingdom, Israel, Switzerland. | |
| dc.identifier.doi | 10.1117/12.2614142 | |
| dc.identifier.eisbn | 978-1-5106-4978-1 | |
| dc.identifier.isbn | 978-1-5106-4977-4 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40465 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 1205105 | |
| dc.source.conference | Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference | |
| dc.source.conferencedate | APR 24-MAY 27, 2022 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 9 | |
| dc.source.volume | 12051 | |
| dc.title | Calibration of Gaussian Random Field stochastic EUV models | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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