Publication:
Growth per cycle in atomic layer deposition: a theoretical model
Date
| dc.contributor.author | Puurunen, Riikka | |
| dc.date.accessioned | 2021-10-15T06:16:02Z | |
| dc.date.available | 2021-10-15T06:16:02Z | |
| dc.date.issued | 2003-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8042 | |
| dc.source.beginpage | 249 | |
| dc.source.endpage | 257 | |
| dc.source.issue | 5 | |
| dc.source.journal | Chemical Vapor Deposition | |
| dc.source.volume | 9 | |
| dc.title | Growth per cycle in atomic layer deposition: a theoretical model | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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