Publication:

Modeling of in-plane distortions and overlay errors encountered during 3-D NAND flash device fabrication

Date

2023

Proceedings Paper

https://doi.org/10.1109/EuroSimE56861.2023.10100780

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Author(s)

Okudur, Oguzhan Orkut

;

Gonzalez, Mario

;

Van den Bosch, Geert

;

Rosmeulen, Maarten

Journal

N/A

Metrics

771 since deposited on 2023-10-17

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Acq. date: 2025-12-17