Publication:

Modeling of in-plane distortions and overlay errors encountered during 3-D NAND flash device fabrication

Date

2023
Proceedings Paper
https://doi.org/10.1109/eurosime56861.2023.10100780
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Author(s)

Okudur, Oguzhan Orkut  
;
Gonzalez, Mario  
;
Van den Bosch, Geert  
;
Rosmeulen, Maarten  

Journal

N/A

Abstract

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