Publication:
An analytical model to describe the efficiency of an immersion rinsing process
Date
| dc.contributor.author | Fyen, Wim | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.date.accessioned | 2021-10-17T07:10:15Z | |
| dc.date.available | 2021-10-17T07:10:15Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2008-11 | |
| dc.identifier.issn | 0894-6507 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13743 | |
| dc.source.beginpage | 661 | |
| dc.source.endpage | 667 | |
| dc.source.issue | 4 | |
| dc.source.journal | IEEE Transactions on Semiconductor Manufacturing | |
| dc.source.volume | 21 | |
| dc.title | An analytical model to describe the efficiency of an immersion rinsing process | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |