Publication:
Ni silicide morphology on small features
Date
| dc.contributor.author | Chamirian, Oxana | |
| dc.contributor.author | Lauwers, Anne | |
| dc.contributor.author | Kittl, Jorge | |
| dc.contributor.author | Van Dal, Mark | |
| dc.contributor.author | de Potter de ten Broeck, Muriel | |
| dc.contributor.author | Vrancken, Christa | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Lauwers, Anne | |
| dc.contributor.imecauthor | Van Dal, Mark | |
| dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
| dc.contributor.imecauthor | Vrancken, Christa | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T12:50:36Z | |
| dc.date.available | 2021-10-15T12:50:36Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8667 | |
| dc.source.conference | Silicon Front-End Junction Formation - Physics and Technology | |
| dc.source.conferencedate | 12/04/2004 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Ni silicide morphology on small features | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |