Publication:
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
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1991 since deposited on 2021-10-22
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Acq. date: 2026-02-27
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Statistics
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1991 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-02-27
Citations