Publication:
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
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1983 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-12
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Metrics
Views
1983 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-12
Citations