Publication:
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
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1999 since deposited on 2021-10-22
6last month
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Acq. date: 2026-08-06
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Statistics
Views
1999 since deposited on 2021-10-22
6last month
4last week
Acq. date: 2026-08-06
Citations