Publication:
Influence of etch process on contact hole local critical dimension uniformity in extreme-ultraviolet lithography
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1987 since deposited on 2021-10-22
4last month
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Acq. date: 2026-01-08
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1987 since deposited on 2021-10-22
4last month
2last week
Acq. date: 2026-01-08
Citations