Impact of substrate resistivity on the high frequency performance of metal interconnect

dc.contributor.author	Jenei, Snezana
dc.contributor.author	Kol'dyaev, Victor
dc.contributor.author	Decoutere, Stefaan
dc.contributor.author	Kuhn, Rudiger
dc.contributor.author	Deferm, Ludo
dc.contributor.imecauthor	Decoutere, Stefaan
dc.contributor.imecauthor	Deferm, Ludo
dc.contributor.orcidimec	Decoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned	2021-10-06T11:26:25Z
dc.date.available	2021-10-06T11:26:25Z
dc.date.issued	1999
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3537
dc.source.beginpage	242
dc.source.conference	Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA.
dc.source.endpage	244
dc.title	Impact of substrate resistivity on the high frequency performance of metal interconnect
dc.type	Proceedings paper
dspace.entity.type	Publication
Files
Publication available in collections:	Conference contributions

Date