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Dopant segregation and diffusion in CVD epitaxial grown germanium
Publication:
Dopant segregation and diffusion in CVD epitaxial grown germanium
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Date
2017-11
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Murota, Junichi
;
Yamamoto, Yuchi
;
Costina, Ioan
;
Baerwolf, Florian
;
Tillack, Bernd
;
Le Thanh, Vinh
;
Loo, Roger
;
Douhard, Bastien
;
Ayyad, Mustafa
;
Caymax, Matty
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1925
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Acq. date: 2025-12-14
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Views
1925
since deposited on 2021-10-24
1
last month
Acq. date: 2025-12-14
Citations