Publication:

Dopant segregation and diffusion in CVD epitaxial grown germanium

Date

2017-11

Proceedings Paper

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Author(s)

Murota, Junichi

;

Yamamoto, Yuchi

;

;

Baerwolf, Florian

;

;

;

;

Douhard, Bastien

;

;

Metrics

1925 since deposited on 2021-10-24

Acq. date: 2026-01-08