Publication:

Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum

Date

2021
Journal article
https://doi.org/10.1149/2162-8777/ac26d3
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dc.contributor.authorRyu, Heon-Yul
dc.contributor.authorTeugels, Lieve
dc.contributor.authorDevriendt, Katia
dc.contributor.authorStruyf, Herbert
dc.contributor.authorKim, Tae-Gon
dc.contributor.authorPark, Jin-Goo
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.date.accessioned2022-03-02T13:22:26Z
dc.date.available2022-03-02T13:22:26Z
dc.date.issued2021
dc.identifier.doi10.1149/2162-8777/ac26d3
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39229
dc.publisherELECTROCHEMICAL SOC INC
dc.source.beginpage094001
dc.source.issue9
dc.source.journalECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
dc.source.numberofpages6
dc.source.volume10
dc.subject.keywordsPEROXIDE DERIVATIVES
dc.subject.keywordsCMP
dc.subject.keywordsCORROSION
dc.subject.keywordsGLYCINE
dc.title

Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum

dc.typeJournal article
dspace.entity.typePublication
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