Publication:

Study of EUV reticle storage effects through exposure on EBL2 and NXE

Date

2020

Proceedings Paper

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Author(s)

Jonckheere, Rik

;

;

Nair, Vineet Vijayakrishnan

;

Hendrickx, Eric

;

Wu, Chien-ching

;

de Rooij-Lohmann, Veronique

;

Eslstgeest, Dorus

;

;

Soltwich, Victor

;

Hoenicke, Philipp

;

;

Metrics

2019 since deposited on 2021-10-28

Acq. date: 2025-12-11