Publication:
From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis
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2053 since deposited on 2021-10-15
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Acq. date: 2026-08-05
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Statistics
Views
2053 since deposited on 2021-10-15
3last month
3last week
Acq. date: 2026-08-05
Citations