Publication:

Ensemble RBS: Probing the compositional profile of 3D microscale structures

Date

2022
Journal article
https://doi.org/10.1016/j.surfin.2022.102101
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dc.contributor.authorClaessens, Niels
dc.contributor.authorCouture, Pierre
dc.contributor.authorEngland, Jonathan
dc.contributor.authorVos, Rita
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVantomme, Andre
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecVos, Rita::0000-0003-2610-3406
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2022-08-29T10:20:40Z
dc.date.available2022-07-10T02:26:51Z
dc.date.available2022-07-23T10:58:50Z
dc.date.available2022-08-29T10:20:40Z
dc.date.embargo9999-12-31
dc.date.issued2022
dc.description.wosFundingTextThis work was supported by the European Union's Horizon 2020 research and innovation programme [grant number 824096 - RADIATE] and by the Research Foundation - Flanders (FWO) [grant number 1S45421N].
dc.identifier.doi10.1016/j.surfin.2022.102101
dc.identifier.issn2468-0230
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40105
dc.publisherELSEVIER
dc.source.issueAugust
dc.source.journalSURFACES AND INTERFACES
dc.source.numberofpages10
dc.source.volume32
dc.subject.keywordsION-BEAM ANALYSIS
dc.title

Ensemble RBS: Probing the compositional profile of 3D microscale structures

dc.typeJournal article
dspace.entity.typePublication
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