Publication:
Surface reactions in plasma etching for nanoelectronics
Date
| dc.contributor.author | Shamiryan, Denis | |
| dc.date.accessioned | 2021-10-18T21:27:21Z | |
| dc.date.available | 2021-10-18T21:27:21Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17971 | |
| dc.source.conference | International Conference on Modern Problems in the Physics of Surfaces and Nanostructures - ICMPSN | |
| dc.source.conferencedate | 8/06/2010 | |
| dc.source.conferencelocation | Yaroslavl Russia | |
| dc.title | Surface reactions in plasma etching for nanoelectronics | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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