Publication:
Enhanced etching of GaN with N2 gas addition during CVD diamond growth
| dc.contributor.author | Mallik, Awadesh | |
| dc.contributor.author | Krishnamurthy, Giridharan | |
| dc.contributor.author | Shih, Wen-Ching | |
| dc.contributor.author | Pobedinskas, Paulius | |
| dc.contributor.author | D'Haen, Jan | |
| dc.contributor.author | Haenen, Ken | |
| dc.contributor.imecauthor | Krishnamurthy, Giridharan | |
| dc.contributor.imecauthor | Pobedinskas, Paulius | |
| dc.contributor.imecauthor | D'Haen, Jan | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.imecauthor | Mallik, Awadesh | |
| dc.contributor.orcidimec | Pobedinskas, Paulius::0000-0001-8136-5172 | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.date.accessioned | 2024-11-18T13:01:57Z | |
| dc.date.available | 2024-08-30T17:34:43Z | |
| dc.date.available | 2024-11-18T13:01:57Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | This work was financially supported by the Methusalem NANO network and the Research Foundation - Flanders (FWO) via project G0D4920N. AKM acknowledges FWO for his Postdoctoral Fellowship with grant no. 12X2919N. | |
| dc.identifier.doi | 10.1080/26941112.2024.2393817 | |
| dc.identifier.issn | 2694-1112 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44386 | |
| dc.publisher | TAYLOR & FRANCIS LTD | |
| dc.source.beginpage | Art. 2393817 | |
| dc.source.endpage | N/A | |
| dc.source.issue | 1 | |
| dc.source.journal | FUNCTIONAL DIAMOND | |
| dc.source.numberofpages | 10 | |
| dc.source.volume | 4 | |
| dc.subject.keywords | SPECTROSCOPY | |
| dc.subject.keywords | DEPOSITION | |
| dc.subject.keywords | CARBON | |
| dc.title | Enhanced etching of GaN with N2 gas addition during CVD diamond growth | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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