Publication:

Enhanced etching of GaN with N2 gas addition during CVD diamond growth

 
dc.contributor.authorMallik, Awadesh
dc.contributor.authorKrishnamurthy, Giridharan
dc.contributor.authorShih, Wen-Ching
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorD'Haen, Jan
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorKrishnamurthy, Giridharan
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorMallik, Awadesh
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2024-11-18T13:01:57Z
dc.date.available2024-08-30T17:34:43Z
dc.date.available2024-11-18T13:01:57Z
dc.date.issued2024
dc.description.wosFundingTextThis work was financially supported by the Methusalem NANO network and the Research Foundation - Flanders (FWO) via project G0D4920N. AKM acknowledges FWO for his Postdoctoral Fellowship with grant no. 12X2919N.
dc.identifier.doi10.1080/26941112.2024.2393817
dc.identifier.issn2694-1112
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44386
dc.publisherTAYLOR & FRANCIS LTD
dc.source.beginpageArt. 2393817
dc.source.endpageN/A
dc.source.issue1
dc.source.journalFUNCTIONAL DIAMOND
dc.source.numberofpages10
dc.source.volume4
dc.subject.keywordsSPECTROSCOPY
dc.subject.keywordsDEPOSITION
dc.subject.keywordsCARBON
dc.title

Enhanced etching of GaN with N2 gas addition during CVD diamond growth

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections: