Publication:
Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Callewaert, Sven | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.date.accessioned | 2021-10-14T18:13:08Z | |
| dc.date.available | 2021-10-14T18:13:08Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5782 | |
| dc.source.beginpage | 613 | |
| dc.source.conference | Characterization and Metrology for ULSI Technology 2000: International Conference; Gaithersburg, Maryland, 26-29 June 2000. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 619 | |
| dc.title | Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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