Publication:
Localizing manufacturing defects in 3-D IC technology by scanning photocapacitance microscopy
Date
| dc.contributor.author | Jacobs, Kristof J.P. | |
| dc.contributor.imecauthor | Jacobs, Kristof J.P. | |
| dc.contributor.orcidimec | Jacobs, Kristof J.P.::0000-0002-1081-3633 | |
| dc.date.accessioned | 2021-10-25T20:12:41Z | |
| dc.date.available | 2021-10-25T20:12:41Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30944 | |
| dc.source.conference | Invited seminar at Ultrafast Photonics Laboratory | |
| dc.source.conferencedate | 19/10/2018 | |
| dc.source.conferencelocation | Kobe Japan | |
| dc.title | Localizing manufacturing defects in 3-D IC technology by scanning photocapacitance microscopy | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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