Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Yamamoto, Yuji; Wen, Wei-Chen; Schubert, Markus Andreas; Corley-Wiciak, Agnieszka Anna; Sugawa, Sho; Ito, Yuta; Yokogawa, Ryo; Han, Han; Loo, Roger; Ogura, Atsushi; Tillack, Bernd

doi:10.35848/1347-4065/ad189d

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Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Date

2024

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https://doi.org/10.35848/1347-4065/ad189d

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Yamamoto, Yuji

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Wen, Wei-Chen

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Schubert, Markus Andreas

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Corley-Wiciak, Agnieszka Anna

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JAPANESE JOURNAL OF APPLIED PHYSICS

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193 since deposited on 2024-01-25

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Acq. date: 2025-12-10

112 since deposited on 2024-01-25

Acq. date: 2025-12-10

Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

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