Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Yamamoto, Yuji; Wen, Wei-Chen; Schubert, Markus Andreas; Corley-Wiciak, Agnieszka Anna; Sugawa, Sho; Ito, Yuta; Yokogawa, Ryo; Han, Han; Loo, Roger; Ogura, Atsushi; Tillack, Bernd

doi:10.35848/1347-4065/ad189d

Publication:

Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Date

2024

Journal article

https://doi.org/10.35848/1347-4065/ad189d

Simple item page Full metadata Statistics

Files

Published version 1.94 MB

Author(s)

Yamamoto, Yuji

;

Wen, Wei-Chen

;

Schubert, Markus Andreas

;

Corley-Wiciak, Agnieszka Anna

;

;

;

;

;

;

;

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

Statistics

354 since deposited on 2024-01-25

2last month

2last week

Acq. date: 2026-07-16

115 since deposited on 2024-01-25

Acq. date: 2026-07-16

Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations