Publication:
Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches
Date
| dc.contributor.author | Favia, Paola | |
| dc.contributor.author | Witters, Liesbeth | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Favia, Paola | |
| dc.contributor.imecauthor | Witters, Liesbeth | |
| dc.contributor.imecauthor | Mitard, Jerome | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
| dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-22T01:26:52Z | |
| dc.date.available | 2021-10-22T01:26:52Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23810 | |
| dc.source.conference | 18th International Microscopy Congress | |
| dc.source.conferencedate | 7/09/2014 | |
| dc.source.conferencelocation | Praag Czech Republic | |
| dc.title | Investigation of 3D strain in FinFETs by nano beam diffraction parallel and perpendicular to the trenches | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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