Publication:

Oxygen Defect Stability in Amorphous, C-Axis Aligned, and Spinel IGZO

Date

2021
Journal article
https://doi.org/10.1021/acsaelm.1c00553
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dc.contributor.authorvan Setten, Michiel
dc.contributor.authorDekkers, Harold
dc.contributor.authorKljucar, Luka
dc.contributor.authorMitard, Jerome
dc.contributor.authorPashartis, Christopher
dc.contributor.authorSubhechha, Subhali
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorDelhougne, Romain
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorPourtois, Geoffrey
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorKljucar, Luka
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorPashartis, Christopher
dc.contributor.imecauthorSubhechha, Subhali
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecSubhechha, Subhali::0000-0002-1960-5136
dc.date.accessioned2022-04-25T10:01:18Z
dc.date.available2021-11-02T15:56:07Z
dc.date.available2022-04-04T09:21:20Z
dc.date.available2022-04-25T10:01:18Z
dc.date.issued2021
dc.identifier.doi10.1021/acsaelm.1c00553
dc.identifier.issn2637-6113
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37491
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage4037
dc.source.endpage4046
dc.source.issue9
dc.source.journalACS APPLIED ELECTRONIC MATERIALS
dc.source.numberofpages10
dc.source.volume3
dc.subject.keywordsTHIN-FILM
dc.subject.keywordsA-IGZO
dc.subject.keywordsPSEUDOPOTENTIALS
dc.subject.keywordsSYSTEM
dc.subject.keywordsMATRIX
dc.title

Oxygen Defect Stability in Amorphous, C-Axis Aligned, and Spinel IGZO

dc.typeJournal article
dspace.entity.typePublication
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