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Role of O2 radicals on silicone plasma treatments for surface passivation of wafers bonded to glass
Publication:
Role of O2 radicals on silicone plasma treatments for surface passivation of wafers bonded to glass
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Granata, Stefano
;
Marchegiani, Alessio
;
Bearda, Twan
;
Tous, Loic
;
Cheyns, David
;
Abdulraheem, Yaser
;
Gordon, Ivan
;
Szlufcik, Jozef
;
Mertens, Robert
;
Poortmans, Jef
Journal
Physica Status Solidi A
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1988
since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations
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Views
1988
since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations