Publication:

Submicron three-terminal SiGe electromechanical ohmic relay

Date

2014
Proceedings Paper
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dc.contributor.authorRamezani, Maliheh
dc.contributor.authorCosemans, Stefan
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.authorOsman, Haris
dc.contributor.authorTilmans, Harrie
dc.contributor.authorSeveri, Simone
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorCosemans, Stefan
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-22T05:00:24Z
dc.date.available2021-10-22T05:00:24Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24420
dc.identifier.urlhttp://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6765836
dc.source.beginpage1095
dc.source.conference27th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate26/01/2014
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage1098
dc.title

Submicron three-terminal SiGe electromechanical ohmic relay

dc.typeProceedings paper
dspace.entity.typePublication
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